OXIDE INTERFACIAL PHASES AND THE ELECTRICAL PROPERTIES OF SrBi2Ta2O9 THIN FILMS PREPARED BY PLASMA - ENHANCED METALORGANIC CHEMICAL VAPOR DEPOSITION

( N . J . Seong , C . H . Yang , W . C . Shin , S . G . Yoon )

한국전기전자재료학회 1998.09

E²M-전기 전자와 첨단 소재 vol. 11 iss. 9 70-70(1pages)

UCI I410-ECN-0102-2008-560-001251593

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