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한국전기전자재료학회
E²M-전기 전자와 첨단 소재
RF 플라즈마 CVD 법에 의한 다이아몬드 박막의 합성
RF 플라즈마 CVD 법에 의한 다이아몬드 박막의 합성
이상희 , 이덕출
한국전기전자재료학회
1998.07
E²M-전기 전자와 첨단 소재
vol. 11 iss. 7
669-669(1pages)
UCI
I410-ECN-0102-2009-560-007352862
₩ 1,000
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