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한국전기전자재료학회
E²M-전기 전자와 첨단 소재
Microelectromechanical system 소자 제작을 위한 유기금속분해법에 의한 압전성 PZT(53/47) 박막의 증착
Microelectromechanical system 소자 제작을 위한 유기금속분해법에 의한 압전성 PZT(53/47) 박막의 증착
윤영수 , 정형진 , 신영화
한국전기전자재료학회
1998.06
E²M-전기 전자와 첨단 소재
vol. 11 iss. 6
552-552(1pages)
UCI
I410-ECN-0102-2009-560-007352428
₩ 1,000
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