Decomposition of chlorofluorocarbon (CFC) was carried out using a Surface discharge induced Plasma Chemical Process (SPCP) reactor, and the effect of process variables such as decomposition efficiency, power consumption and applied voltage were investigated. The decomposition efficiency of CFC-12 with various electric frequencies (5~50 kHz), flow rates (100~1000 mL/min), initial concentrations (100~10000 ppm), electrode materials (W, Cu, Al), and electrode thicknesses (1, 2, 3 mm) was measured and the products were analyzed by FT-IR. The experimental results showed that a frequency of 10 kHz produced the highest decomposition efficiency of 92.7% for CFC-12 at the power consumption of 29.6 W and that the decomposition efficiency decreased when increasing the frequency above 20 kHz. As such, the decomposition efficiency per unit power was 3.13%/W for CFC-12. The decomposition efficiency increased when increasing the residence time and decreasing the initial concentration of pollutants. The decomposition efficiency also increased when increasing the thickness of the discharge electrode, and the highest decomposition efficiency was obtained with an electrode diameter of 3 mm. As regards the electrode material, the decomposition efficiency was in the order of tungsten (W), copper (Cu), and aluminum (Al). The optimum power for the maximum decomposition efficiency was 25.3 W for CFC.