In this study, lattice parameter, binding energy and microstructures of TiC layer according to the addition of Fe, Cr were investigated in the reactive deposition coating. From the results, the lattice parameters of the TiC layers by using ferro-titanium as a precursor were 4.329∼4.339A but the lattice parameters of the TiC layers formed by ferro-titanium and ferro-chromium decreased to 4.316∼4.330Å. The hardness of the former`s was HV(100g) 3,000∼3,400㎏/㎜ and the hardness of the latter`s was HV(100g) 3,800∼3,900. But, regardless of Cr and Fe, the binding energy of TiC layers were 454.75 eV for Ti2p_(3/2) and were 281.85 eV for Cls. Meanwhile, the TiC layers were densified by addition of Fe, Cr and internal defects were reduced Therefore, it can be concluded that the remarkable hardness increment was obtained by the improvement of microstructures of TiC rather than the increase of bond strength or Peierls stress.