Microstructural evolution of wrought Inconel 718 superalloy with different heat treatment conditions was studied. Heat treatment was performed via conventional(CHT), modified(MHT), Merrick(MeHT) and modified Merrick(MMeHT) methods. The size of γ` and γ" precipitates which are principal strengthening phases in Inconel 718 superalloy increase in order of CHT, MHT, MeHT. For the case of MMeHT, a coexistence of fine γ` precipitate and very coarse particles due to exess growth of γ" which is called bimodal distribution, was observed. CHT gave the finest grain size. (Ti, Nb)C carbide and needle-like δ phase were formed together at grain boundaries for CHT, and were formed both inside and at boundaries of grains for MHT, MeHT and MMeHT. Morphology of partially serrated grain boundaries was developed in all heat treatment conditions except CHT.