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한국공업화학회
한국공업화학회 연구논문 초록집
Rf - plasma CVD 에 의해 제조된 Iron Silicide 막의 특성
Rf - plasma CVD 에 의해 제조된 Iron Silicide 막의 특성
모만진 , 김경수 , 전법주 , 정일현
한국공업화학회
1998.12
한국공업화학회 연구논문 초록집
vol. 1998
65-65(1pages)
UCI
I410-ECN-0102-2009-570-007304673
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