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한국공업화학회
한국공업화학회 연구논문 초록집
Plasma Enhanced Chemical Vapor Deposition of 3C - SiC (111) Thin Film on Silicon
Plasma Enhanced Chemical Vapor Deposition of 3C - SiC (111) Thin Film on Silicon
김광철 , 서영훈 , 심현욱 , 서은경 , 이형재 , 남기석
한국공업화학회
1996.12
한국공업화학회 연구논문 초록집
vol. 1996
165-165(1pages)
UCI
I410-ECN-0102-2009-570-007291206
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