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한국공업화학회
한국공업화학회 연구논문 초록집
Pentamethoxy Tantalum 으로부터 고 내식성 MOCVD - Ta2O5 박막의 형성에 관한 연구
Pentamethoxy Tantalum 으로부터 고 내식성 MOCVD - Ta2O5 박막의 형성에 관한 연구
안춘호 , 삼본극구 (杉本克久)
한국공업화학회
1993.12
한국공업화학회 연구논문 초록집
vol. 1993
27-29(3pages)
UCI
I410-ECN-0102-2009-570-007360335
₩ 1,000
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