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18.97.14.83
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열 CVD 법에 의한 ZnO 박막의 저온 합성 (3) - 수평형 반응기증의 성장속도 해석 -
Preparation of ZnO Thin Film by Thermal CVD PART 3 Growth Rate Analysis in Horizontal Reactor
양호열 , 문희 , 박홍철 ( Ho Yeul Yang , Hee Moon , Heung Chul Park )
UCI I410-ECN-0102-2009-570-007360153
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