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18.97.14.91
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한국공업화학회
한국공업화학회 연구논문 초록집
KMnO4 - HF - H2O 혼합용액에서 Si 의 식각반응에 관한 연구
KMnO4 - HF - H2O 혼합용액에서 Si 의 식각반응에 관한 연구
A Study on Si Etching Reation in KMnO4 - HF - H2O Solution
서영훈 , 남기석 ( Young Hun Seo , Kee Suk Nahm )
한국공업화학회
1991.12
한국공업화학회 연구논문 초록집
vol. 1991
23-23(1pages)
UCI
I410-ECN-0102-2009-570-007353363
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