열 CVD 법에 의한 ZnO 박막의 저온합성 (1) - 박막성장속도 -

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정상철 , 문희 , 박흥철 ( Sang Chul Jung , Hee Moon , Heung Chul Park )

한국공업화학회 1990.12

한국공업화학회 연구논문 초록집 vol. 1990 29-29(1pages)

UCI I410-ECN-0102-2009-570-007343658

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