Hexamethylcyclotrisiloxane (D_3), tetramethylcyclotetrasiloxane (TMCTS)을 공중합 시켜 Si-H 결합을 함유한 polysiloxane 공중합체를 합성하고 allylamine과 반응시켜 amino기를 도입시킨 후 naphthoquinone-1,2-diazide-5-sulfonyl chlorde 와 반응시켜 naphthoquinone-1,2-diazide-5-sulfonyl 기가 도입된 polysiloxane 을 합성하였다. 생성 공중합체의 열적특성을 측정한 결과, 열분해온도는 360∼450 ℃ 정도였으며 또한 감광특성은 backbone 수지의 분자량이나 증감제의 종류에 따라 영향을 받았다. Sensitivity는 50∼120 mJ/㎠였고 contrast(γ)는 1.4∼2.1였으며 backbone 수지의 분자량이 증가함에 따라 약간 감소하였다.

Polysiloxane copolymers were prepared by copolymerizing hexamethylcyclotrisiloxane with tetramethylcyclotetrasiloxane, and then reacted with allyamine. Copolymers containing naphthoquinone-1,2-diazide-5-sulfonyl group were synthesized by reacting naphthoquinone-1,2-diazide-5-sulfonyl chloride with siloxane copolymers having amino group. Thermal decomposition temperatures of copolymers were 360∼450 ℃, and photosensitive characteristics were dependent on the molecular weights of backbone resins and sensitizers. Sensitivity of copolymers was 50-120 mJ/㎠ and contrast (γ) was 1.4∼2.1.