18.97.9.171
18.97.9.171
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RF Magnetron Sputtering 법으로 제조된 LaFeO3 박막의 가스감지 특성
Gas sensing Properties of LaFeO3 thin films fabricated by RF magnetron sputtering method
장재영(Jae Young Jang),마대영(Dae Young Ma),박기철(Ki Cheol Park),김정규(Jeong Gyoo Kim)
센서학회지 vol. 9 iss. 5 357-364(8pages)
UCI I410-ECN-0102-2009-530-005923765
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