The relationship between creep deformation and microstructural changes in martensitic 10Cr-MoW steel has been studied. Transmission electron microscopy and image analyser were used to determine the variation of precipitates and martensite lath width size during creep deformation and aging. As precipitates are coarsened during creep deformation, dislocations become easy to move and the recovery proceeds rapidly. This leads to the growth of lath width. The average size of precipitates was linearly increased with creep time. On the other hand the growth rate of lath width is constant until tertiary creep, but the growth of lath width is accelerated during tertiary creep. It has been concluded that the growth behavior of lath width are consistent with creep deformation. Because the growth of lath width is controlled by the coarsening of precipitates it is important to form more stable precipitates in creep condition for improvement of creep properties of martensitic steel. Microstructure of martensitic steel is thermally very stable, so the size of precipitates and martensite lath width are hardly changed during aging.