18.97.14.88
18.97.14.88
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코스퍼터링 TiSi2 박막의 상변태와 응력해석
Phase transformation ( C49→C54 ) of TiSi2 co-sputtered thin film and stress analysis
김종환 , 박중근
UCI I410-ECN-0102-2009-580-007441637
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