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ENG
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대한금속재료학회
재료·물성 심포지엄
High Dielectric Materials for ULSI Devices 초고집적 반도체 소자를 위한 고유전 재료
High Dielectric Materials for ULSI Devices 초고집적 반도체 소자를 위한 고유전 재료
이대훈
대한금속재료학회
1995.01
재료·물성 심포지엄
vol. 8
30-40(11pages)
UCI
I410-ECN-0102-2009-580-007115189
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