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대한금속재료학회
재료·물성 심포지엄
HFCVD 법에 의해 제조된 다이아몬드 박막의 성장특성
HFCVD 법에 의해 제조된 다이아몬드 박막의 성장특성
Growth of Diamond Thin Films by HFCVD Method
박순 ( Soon Park ) 70
대한금속재료학회
1991.01
재료·물성 심포지엄
vol. 5
65-70(6pages)
UCI
I410-ECN-0102-2009-580-007114915
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