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대한금속재료학회
대한금속학회회보
ULSI 소자에 있어서 배선재료의 현황과 전망
ULSI 소자에 있어서 배선재료의 현황과 전망
Reviews and Prospectives of Interconnection Materials in ULSI Devices
김영욱 ( Young Wug Kim )
대한금속재료학회
1994.01
대한금속학회회보
vol. 7 iss. 1
40-51(12pages)
UCI
I410-ECN-0102-2009-580-007399205
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