To obtain fundamental informations for fine tungsten carbide powders, the preparation of fine tungsten carbide by vapor phase reaction of WCl_6-CCl₄-H₂ system has been carried out in the temperature range of 800-1300℃. The effects of reaction conditions on particle size and morphology of tungsten carbide powders have been investigated by utilizing X-ray diffraction, SEM and TEM techniques. The content of WC increased remarkably with increasing the reaction temperature and the maximum content was about 97% at 1100℃ in the condition of the flow rate of Ar gas 200㎖/min, H₂ gas 100㎖/min and CCl₄ gas 40㎖/min. The particle size of the reation products obtained at 1100℃ was about 0.05㎛ and the shape of WC was spherical. The particle size decreased linearly with increasing reation temperature. Also the crystallite size increased gradually with increasing reaction temperature.