18.97.14.84
18.97.14.84
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SCIE SCOPUS
화학증착법에 의한 다이아몬드막의 성장특성에 관한 열역학적 분석
Thermodynamic analysis of Diamond Films Synthesized by CVD Method
박순 ( Soon Park )
UCI I410-ECN-0102-2008-580-001847064
This article is 4 pages or less.

Equilibrium concentrations of various hydrocarbon species which existed in the vapor for growing solid carbon is calculated and a phase diagram for the carbon-hydrogen system is obtained using the thermodynamic quasi-equilibrium model. These calculations show that methane is the sole reaction product at temperatures below 1000℃, acethylene is, however, the dominant hydrocarbon speies above 2000℃. The CVD phase diagram shows that high methane concentrations and low total pressures decrease the lower temperature limit required to obtain any deposit. The fraction of carbon deposited from methane-hydrogen mixtures changes rapidly from practically zero at lower temperature limit to close to 100% over a couple of hundred degrees, then to decrease to zero at higher temperature limit.

[자료제공 : 네이버학술정보]
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