복결정 X 선 회절 방법에 의한 CdTe , CdZnTe 웨이퍼의 결정성 분석

송원준; 금동화; 서상희; 임성욱; 이태석; 김재묵

대한금속재료학회 대한금속재료학회지 복결정 X 선 회절 방법에 의한 CdTe , CdZnTe 웨이퍼의 결정성 분석

SCIE SCOPUS

Evaluation of the Crystalline Quality of Cdte and CdZnTe with a Double Crystal X-ray Diffraction Technique

송원준(Won Joon Sohng), 금동화(Dong Wha Kum), 서상희(Sang Hee Suh), 임성욱(Sung Wook Lim), 이태석(Tae Suk Lee), 김재묵(Jae Mook Kim)

대한금속재료학회 1991.10

대한금속재료학회지 vol. 29 iss. 10 1100-1102(3pages)

UCI I410-ECN-0102-2008-580-001847524

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Abstract

The crystallinity of CdTe and CdZnTe grown by Bridgman method were evaluated using a double crystal diffraction technique. The FWHM of the rocking curve was compared with the etch-pit density. FWHM increased with the increase of etch-pit density, the increasing rate depending on the density and distribution of etch-pits.

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