18.97.14.85
18.97.14.85
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SCIE SCOPUS
(111) CdTe 기판의 이탈방위각이 LPE 법으로 성장시킨 Hg0.7Cd0.3Te 박막의 표면 형상에 미치는 영향
Effect of Misorientaion of (111) CdTe Substrate on the Surface Morphology of Hg0.7Cd0.3Te Grown by an LPE Process
곽로정(N . J . Kwak), 임성욱(S . W . Lim), 최인훈(I . H . Choi), 김재묵(J . M . Kim), 서상희(S . H . Suh)
UCI I410-ECN-0102-2008-580-001848490

Hg_(0.7)Cd_(0.3)Te epilayers were grown by a silder-type LPE(liquid phase epitaxy) technique using Te-rich growth solution. CdTe substrates of (111)Cd orientation with various degrees of misorientation were prepared by vertical Bridgman crystal growth and subsequent chemo-mechanical polishing processes. Epi-layers, which were grown using a substrate with 1^0 misoriented toward four different directions, showed a typical terrace morphology with terrace fronts perpendicular to the misorientation directions. As the misoriented angle increases, the terrace width decreases, while the terrace height increases. With the misorientation larger than 2^0, the terrace structure begins to disappear transforming into a wave-like surface. The initial stage of the epi-layer growth is thought to be governed by the so-called step bunching process. Dislocations begin to play a major role in the growth process when the terrace becomes as wide as 10 to 30㎛. Epi-layers were examined by Nomarski differential interference contrast optical microscope and stylus

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