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18.97.14.87
한국어
ENG
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한국화학공학회
한국화학공학회 추계학술발표논문집
텅스텐의 저압 화학증착에서 운반기체 영향
텅스텐의 저압 화학증착에서 운반기체 영향
The effect of carrier gases in LPCVD tungsten
최희석(H . S . Choi), 이시우(S . W . Rhee), 박상규(S . K . Park)
한국화학공학회
1992.01
한국화학공학회 추계학술발표논문집
vol. 1992
74-74(1pages)
UCI
I410-ECN-0102-2008-570-001900159
₩ 1,000
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