18.97.14.87
18.97.14.87
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텅스텐의 저압 화학증착에서 운반기체 영향
The effect of carrier gases in LPCVD tungsten
최희석(H . S . Choi), 이시우(S . W . Rhee), 박상규(S . K . Park)
UCI I410-ECN-0102-2008-570-001900159
This article is 4 pages or less.
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