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한국어
ENG
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한국화학공학회
화학공업과 기술
CVD 공정의 응용 화학단위공정으로서의 화학증착법
CVD 공정의 응용 화학단위공정으로서의 화학증착법
이시우
한국화학공학회
1993.09
화학공업과 기술
vol. 11 iss. 5
315-323(9pages)
UCI
I410-ECN-0102-2008-570-001948859
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