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18.97.9.172
18.97.9.172
Computational Simulation of Melt Flow in Magnetic Czochralski Growth Process
Computational Simulation of Melt Flow in Magnetic Czochralski Growth Process
Hyung Mann Lee , Ki Jun Lee , Song Yop Hahn
UCI I410-ECN-0102-2008-570-001955447
This article is 4 pages or less.

Melt flow phenomena of magnetic Czochralski processes are simulated numerically. A model is established for the system that can grow a 5 inch diameter single crystal from the melt in a 14 inch diameter cylindrical crucible. Effective conditions to auppress convection adequately are studied by varying rotation rates of the crucible and the crystal for given magnetic fields. When the axial magnetic force is used, the method of co-rotation of the crystal and the crucible is found more effective to suppresi meridionat circulation than the conventional counter-rotation operation.

[자료제공 : 네이버학술정보]
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