광대역 측온저항체 온도센서용 Pt - Co 합금박막의 형성

The Formation of Pt - Co Alloy Thin Films for RTD Temperature Sensors with Wide Temperature Ranges

김서연 , 노상수 , 정귀상 ( Seo Yeon Kim , Sang Soo Noh , Gwiy Sang Chung )

한국전기전자재료학회 1997.01

한국전기전자재료학회 추계학술대회논문집 vol. 1997 iss. 1 335-338(4pages)

UCI I410-ECN-0102-2008-560-002000516

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