Plasma Properties of YBaCuO Oxide Films by rf Facing Targets Magnetron Sputtering

Chung Seog Choi , Kenji Ebihara , Bok Kee Park , Nak Jin Seong , Kyung Sup Lee , Duck Chool Lee

한국전기전자재료학회 1997.01

Proceedings of the 5th International Conference vol. 1997 589-591(3pages)

UCI I410-ECN-0102-2008-560-002003320

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[자료제공 : 네이버학술정보]