Uniform Sputter - Deposition of Titanium Nitride Thin Films by Using New Magnetron Discharge

Yoshinobu MATSUDA , Kiyoshi KUWAHARA , Hiroshi FUJIYAMA

한국전기전자재료학회 1991.01

Proceedings of the 4th Asian Conference on Electrical dischange at PUSAN vol. 1991 177-180(4pages)

UCI I410-ECN-0102-2008-560-002009640

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[자료제공 : 네이버학술정보]