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한국어
ENG
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한국전기전자재료학회
전기전자재료학회논문지
실리콘 질화막의 산화
실리콘 질화막의 산화
The Oxidation of Silicon Nitride Layer
정양희 이영선 박영걸 ( Yang hui Chung , Young sun Lee , Young guol Park )
한국전기전자재료학회
1994.01
전기전자재료학회논문지
vol. 7 iss. 3
231-235(5pages)
UCI
I410-ECN-0102-2008-560-002017442
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